Table 1:Cleanroom HVAC requirements
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(Recommended to meet and exceed Federal Standard 209E,209Class 1VLF,and ISO 14644-1)
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ISO14644-1
Per cubic meter
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209E
Intern. (SI)
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209E English(USA)
per cubic ft.
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Suggested minimum ceiling coverage
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Suggested
filter type
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Suggested minimum
air velocity
@ceiling level
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Suggested minimum cleanroom
air changes
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Class3
Particle counts
≥0.1µm-1,000
≥0.5µm-35
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Class M
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Class1
Particle counts
≥0.1µm-35
≥0.5µm-1
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at 0.12µm
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75 to 90 fpm (0.38to0.46m/sec)
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500 to 640 ach
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Class M 1.5
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Class1
Particle counts
≥0.1µm-35
≥0.5µm-1
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at 0.12µm
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75 to 90 fpm (0.38to0.46m/sec)
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450 to 640 ach
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Class M 2
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Class 10
Particle counts
≥0.1µm-99.1
≥0.5µm-2.83
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at 0.12µm
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70 to 80 fpm (0.36to0.41m/sec)
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420 to 600 ach
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Class4
Particle counts
≥0.1µm-10,000
≥0.5µm-352
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Class M 2.5
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Class 10
Particle counts
≥0.1µm-345
≥0.5µm-10
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100%ceining coverage
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ULPA filters providing efficiency of 99.99995% at 0.12µm
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75 to 90 fpm (0.36to0.41m/sec)
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420 to 600 ach
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Class M 3
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Class 100
Particle counts
≥0.1µm-991
≥0.5µm-28.3
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80%ceining coverage
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HEPA filters providing efficiency of 99.99995% at 0.12µm
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50 to 70 fpm (0.26to0.36m/sec)
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300 to 480 ach
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Class5
Particle counts
≥0.1µm-100,000
≥0.5µm-3520
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Class M 3.5
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Class 100
Particle counts
≥0.1µm-3,450
≥0.5µm-100
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75%ceining coverage
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HEPA filters providing efficiency of 99.99995% at 0.12µm
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50 to 70 fpm (0.26to0.36m/sec)
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300 to480 ach
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Class6
Particle counts
≥0.1µm-1,000,000
≥0.5µm-35200
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Class M 4.5
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Class1000
Particle counts
≥0.5µm-1,000
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40%ceining coverage
0.1µm-34,500
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HEPA filters providing efficiency of 99.99995%
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30 to 50 fpm (0.15to0.25m/sec)
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180 to 300 ach
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Class7
Particle counts
≥0.1µm-1,000
≥0.5µm-35
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Class M 5.5
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Class10,000
Particle counts
≥0.1µm-345,000
≥0.5µm-10,000
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30%ceining coverage
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HEPA filters providing efficiency of 99.99995% at 0.3to0.5µm
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20 to 30 fpm (0.10to0.15m/sec)
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60 to 100 ach
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Class8
Particle counts
≥0.5µm-3,520,000
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Class M 6.5
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Class100,000
Particle counts
≥0.1µm-3,450,000
≥0.5µm-100,000
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15%ceining coverage
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HEPA filters providing efficiency of 99.99995% at 0.12µm
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15 to 20 fpm (0.08to0.10m/sec)
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36 to 90 ach
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Note:Air changes developed for cleanroom heights 9,to16,
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